[robotics-worldwide] IEEE RAS Special Issue Deadline Extended to June 15, 2009: Equipment & Operations Automation in the Semiconductor Industry
james_r_b_morrison at hotmail.com
Fri May 22 00:38:40 PDT 2009
The submission deadline for the IEEE TASE special issue on Equipment and Operations Automation in the Semiconductor Industry has been extended to June 15, 2009 - approximately 3 weeks from today!
The IEEE Transactions on Automation Science and Engineering (IEEE TASE) is a publication of the IEEE Robotics and Automation Society. The special issue is scheduled for publication mid 2010.
Example topics of interest include the scheduling of wafer handling robots to optimize cluster tool throughput, design of equipment and robot structure, factory modeling, decision support systems and the control of robotics for system and/or equipment productivity. Papers addressing topics from the theory and application of robotics and automation in the semiconductor industry are welcome. A more extensive list containing topics of interest is provided below.
Important dates follow:
- June 15, 2009: PAPER SUBMISSION DEADLINE.
- September 15, 2009: Completion of the first round paper review.
- January 1, 2010: Completion of the second round paper review.
- March 1, 2010: Final manuscripts due.
- July 1, 2010: Tentative publication date.
The CFP is available at http://xs3d.kaist.edu/TC-SMA. We welcome high quality papers from both industry and academia.
Topics of interest include but are not limited to the following:
- Decision technologies for equipment automation (e.g., scheduling of wafer handling robots)
- Design concepts for equipment and related automation (e.g., equipment and wafer handling robot structure)
- Design for manufacturing (DFM)
- Factory modeling, analysis and performance evaluation
- Algorithms for planning, scheduling and coordination
- Wafer release and dispatch policies
- Equipment productivity improvement
- Automated material handling systems (AMHS)
- Factory/cell/equipment-level controller design
- Manufacturing execution systems (MES)
- Advanced process control (APC)
- Decision support systems (DSS)
- Yield enhancement systems and e-Diagnosis
- Data mining for yield and production improvement
- Equipment engineering systems (EES)
- Fully automated factory and remote operation center
- Mobile and wireless applications (RFID)
- Agent based intelligent systems
- Engineering chains and supply chains
- Factory of the future
- Benchmark and case studies
- Automation in 300mm prime/450mm wafer generations (e.g., issues in robotics for future wafer size generations)
I look forward to your contribution!
James R. Morrison, Ph.D.
Assistant Professor, Department of Industrial and Systems Engineering, KAIST, South Korea
Co-chair of the IEEE Robotics and Automation Society Technical Committee on Semiconductor Manufacturing Automation
E-mail: james.morrison at kaist.edu, TEL: +82-42-350-3127
xS3D Lab homepage: http://xs3d.kaist.edu
IEEE Technical Committee on Semiconductor Manufacturing Automation: http://xs3d.kaist.edu/TC-SMA
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